Zhou, Ziyou, Xianwu Cai, and Wenfeng Liu. “Study on Properties of Silicon Nitride Film Prepared by PECVD for Solar Cells”. Applied Chemical Engineering 4, no. 2 (October 7, 2021): 74–80. Accessed December 22, 2024. https://ace.as-pub.com/index.php/ACE/article/view/1356.